GE RPS/DPS 8000 Series High Accuracy Resonant Pressure Sensor

The RPS/DPS 8000 is the first product to incorporate the exciting new TERPS technology. TERPS is a resonant silicon pressure sensor technology platform that provides an order of magnitude greater accuracy and stability than current pressure measurement technologies available. The new TERPS technology also extends the pressure range capability to high pressures and by incorporating true pressure media isolation greatly improves its suitability for use in harsh environments.

The RPT has been a very successful product but has a maximum pressure range of 3.5Bar and limited media compatibility. We have been perfecting it’s replacement for some years concentrating on flexible manufacture of a MEMS resonating pressure sensor capable of pressure ranges beyond 700Bar with media compatibility as a key consideration. The resonator has been specifically optimized such that it may be operated in media isolated harsh environment packages.